Go to https://docs.microsoft.com/en-us/sysinternals/downloads/procmon and download the latest version of ProcMon. After extracting the files from the downloaded archive, select the executable that matches the architecture of your test system: use Procmon64.exe for 64-bit systems and Procmon.exe for 32-bit systems. Running the executable, which requires local Administrative group privileges, installs ProcMon on your system, setting up a ProcMon registry key under HLKM\SYSTEM\CurrentControlSet\Services. First access of the executable also requires you to accept the license agreement.
Also note that when ProcMon is first started, it is set to automatically capture events. Be sure to turn off event capturing (File/Capture Events) until the filter is set up and you’re ready to start the test under analysis.